Spray deposition of highly uniform CNT films and their application in gas sensing
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A significant step towards commercialization of novel CNT electronics involves the development of large-area and high-throughput processes for the fabrication of high quality CNT films. In this article, we demonstrate a reliable and reproducible spray deposition process for the fabrication of highly uniform CNT films exhibiting state-of-the-art performance. CNT films with average surface roughness as low as 5.8 nm, and conductivities reaching 4000 S/cm for films of 45 nm thickness, are presented. Incorporating this kind of high quality films as resistive networks for gas detection in ammonia (NH 3) gas sensors, yields device sensitivities reaching 5% at a concentration of 100 ppm for the short exposure interval of only 60 sec. This high NH 3 sensitivity is achieved without any further functionalization of the CNT film, thereby maintaining a simple fabrication process. © 2011 IEEE.