Conductive AFM of transfer printed nano devices
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Nano diodes show great potential for applications in detectors, communications and energy harvesting. However, to make them suitable for low-cost mass production, these nano devices have to be fabricated reliably over large areas while minimizing process time and costs. Printing techniques are promising candidates to overcome these economical drawbacks of conventional nanolithography without a significant loss in structure quality. In this work, we focus on nano transfer printing (nTP) to fabricate nm-scale diodes over extensive areas. Using a temperature-enhanced process, several millions of diodes were transfer-printed in one single step. We show the reliable transfer of functioning Schottky and MIM diodes of different sizes, which demonstrates the versatility and usability of our approach (nTP), paving the way to numerous applications in the fields of e.g. infrared detection or energy harvesting. The nano devices are characterized electrically by conductive Atomic Force Microscopy (c-AFM) measurements. For these MIM structures, quantum-mechanical tunneling was determined to be the main conduction mechanism across the metal-oxide-metal junction. © 2012 IEEE.
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Carbon nanotube thin-film transistors featuring transfer-printed metal electrodes and a thin, self-grown aluminum oxide gate dielectric Haeberle T; Loghin F; Zschieschang U; Klauk H; Lugli P (IEEE, 2015)We report on a novel fabrication scheme to define metal source and drain contacts for short-channel thin-film transistors utilizing a purely additive transfer-printing process. We demonstrate the viability of this approach ...
Pathak A; Bora A; Tornow M; Haeberle T; Lugli P; Schwartz J (Institute of Electrical and Electronics Engineers Inc., 2016)The successful transfer printing of thin metal films onto monolayers of aliphatic bisphosphonic acids (bisPAs) is reported. These monolayers were prepared from solution on plasma-grown aluminum oxide, and were compared ...
Bareiß M; Hochmeister A; Jegert G; Zschieschang U; Klauk H; Huber R; Grundler D; Porod W; Fabel B; Scarpa G; Lugli P (2011)A large area array of metal-oxide-metal (MOM) tunneling diodes with an ultrathin dielectric (∼3.6 nm aluminum oxide) have been fabricated via a transfer-printing process. The MOM diodes exhibit an excellent tunneling ...