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    • Feasibility study of SrRuO3/SrTiO3/SrRuO3 thin film capacitors in DRAM applications 

      Popescu D; Popescu B; Jegert G; Schmelzer S; Boettger U; Lugli P (Institute of Electrical and Electronics Engineers Inc., 2014)
      In this paper, we have investigated the leakage current versus voltage characteristic of high- k thin film capacitors over a large temperature range. Fabricated samples, consisting of a 10-nm thin SrTiO (STO) layer as a ...