Now showing items 1-1 of 1

  • Monte Carlo simulation of leakage currents in TiN/ZrO2 capacitors 

    Jegert G; Kersch A; Weinreich W; Lugli P (2011)
    Leakage currents in TiN-κ-ZrO/TiNcapacitors were simulated by using a novel kinetic Monte Carlo algorithm specially designed to describe tunneling transport of charge carriers in high-κ dielectrics, including defect-assisted ...