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    • Monte Carlo simulation of leakage currents in TiN/ZrO2 capacitors 

      Jegert G; Kersch A; Weinreich W; Lugli P (2011)
      Leakage currents in TiN-κ-ZrO/TiNcapacitors were simulated by using a novel kinetic Monte Carlo algorithm specially designed to describe tunneling transport of charge carriers in high-κ dielectrics, including defect-assisted ...