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Grazing incidence small angle X-ray scattering study of defects in deuterium implanted monocrystalline silicon
Journal article   Peer reviewed

Grazing incidence small angle X-ray scattering study of defects in deuterium implanted monocrystalline silicon

P Dubcek, B Pivac, S Berntorff, Federico Corni, R Tonini and G Ottaviani
Journal of Applied Crystallography, Vol.36, pp.447-449
36
2003
Handle:
https://hdl.handle.net/10863/40227

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