This work outlines the design and validation of an ambient chamber specifically tailored for confocal micro-Raman spectroscopy investigations on semiconductor gas sensors under operando conditions. The system enables real-time analysis of gas–solid interactions providing a reproducible and versatile platform for the characterization of a wide range of gas-sensing devices. A comprehensive study was carried out, covering chamber design, 3D modeling, integration with a custom data acquisition system, residence time distribution analysis for fluid dynamics assessment, temperature and humidity monitoring. Finally, the system was validated using an indium oxide-based sensor exposed to ethanol. The proposed gas-sensing setup is designed to be easy to fabricate, operate, and maintain. It supports solid-state gas sensors with sub-millimeter active areas and can operate at temperatures up to 500 °C achieving high-resolution spectroscopic measurements. Furthermore, its modular architecture ensures seamless integration with various microscopy platforms, enhancing the quality and flexibility of spectral acquisition.
- Design of a micro-Raman spectroscopy chamber for operando studies on semiconductor gas sensors
- Matteo Valt - Fondazione Bruno KesslerGuglielmo Trentini - Free University of Bozen-BolzanoPietro Tosato - Fondazione Bruno KesslerGiada Bombardelli - Free University of Bozen-BolzanoAntonio Orlando - Fondazione Bruno KesslerMarco Magoni - Fondazione Bruno KesslerR Dell’Anna - Fondazione Bruno KesslerAndrea Gaiardo - Fondazione Bruno KesslerBarbara Fabbri - University of Ferrara
- Sensors and Actuators B: Chemical, Vol.447, Part 1, pp.1-10
- 0925-4005
- 1873-3077
- 447, Part 1
- Elsevier
- 10
- (UNIBZ)92067523
991007208154301241 - 2-s2.0-105016635906
- Faculty of Engineering
- English
- Journal article
- Valt M, Trentini G, Tosato P, Bombardelli G, Orlando A, Magoni M, Dell’Anna R, Gaiardo A, Fabbri B