Abstract
Capacitive non-contact imaging of electric fields and potentials with micro-metre resolution can provide relevant insights into material characterisation, structural analysis, electrostatic charge imaging and bio-sensing applications. However, scanning electric potential microscopes have been confined to rigid and single-probe devices, making them slow, prone to mechanical damage and complex to fabricate. In this work, we present the design and characterisation of a novel 5-element flexible array of electric potential probes with spatial resolution down to 20 μm to speed up the scanning time. This was achieved by combining flexible thin-film probes for active guarding and shielding with state-of-the art discrete conditioning circuits. The potential of this approach is showcased by using the fabricated array to image latent fingerprints deposited on an insulating surface by contact electrification, obtain the surface topography of conductive samples and to visualise local dielectric variations.