Abstract
Advancements in materials and technologies have enabled thin-film electronics to be directly developed on previously unsuitable substrates. This paper explores the fabrication of two thin-film temperature sensors, thermistors and resistance temperature detectors (RTD), using stone-based substrates, including marble, brick, stone paper, and Limex paper. The thermistors and RTDs were fabricated utilizing Cu / InGaZnO and Zn, applying the sputtering deposition technique. The sensor’s performance was analyzed based on two different heating methodologies: one using a hotplate, and the other using a localized heating from above. The sensors’ performance was characterized within a temperature range of 25 °C to 80 °C. While the marble thermistor demonstrated the highest sensitivity among all thermistors at -11.54%°C-1, the stone paper RTD similarly showed the highest sensitivity among all RTDs at 0.77 °C-1. The localized heating methodology on top of RTDs resulted in the stone paper and Limex showing negligible hysteresis. Moreover, the sensors demonstrated stable behavior in the multiple reliability tests. Furthermore, Zn-based RTDs were dissolvable in less than 36 hours. The outcomes show that stone-based materials are promising natural eco-friendly substrates for temperature sensors leading to less hazardous electronic waste.