Abstract
We report the fabrication of thermistors and thin-film transistors (TFTs), the crucial components and building blocks of sensor systems, on a transparent and flexible 100 μm-thin glass substrate. The thermal response of thermistors based on InGaZnO (IGZO) with Cu contacts exhibits an expected negative temperature coefficient of resistance of ≈1%∘C−1 at temperatures between 25°C and 60°C. IGZO TFTs were realized with channel lengths as short as 6 μm, displaying a high on-off current ratio of ≈109 and an effective mobility of 7.3 cm2V−1s−1. The AC performance of IGZO TFTs on flexible thin glass was also investigated for the first time resulting in a maximum oscillation frequency and transit frequency of up to 30.6 MHz and 10.4 MHz, respectively.