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High frequency Kelvin probe instrumentation
Conference proceeding   Peer reviewed

High frequency Kelvin probe instrumentation

D D'Amico, M Scarselli, V Foglietti, P Chiaradia, Paolo Lugli and C Di Natale
Sensors and Microsystems: Proceedings of the 7th Italian conference; Bologna, Italy, 4-6 February 2002, Vol.4, pp.75-79
4
7th Italian Conference on Sensors and Microsystems (Bologna, 04/02/2002 - 06/02/2002)
2002
DOI: https://doi.org/10.1142/9789812776457_0011
Handle:
https://hdl.handle.net/10863/9893

Abstract

Sensors
This paper illustrates preliminary results obtained along the fabrication of a high frequency Kelvin Probe designed for detecting surfaces work function with an estimated resolution of about one micron. The schematic of the apparatus and the main technological steps are presented and commented together with some of the problems that still have to be solved in order to achieve the expected accuracy.

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